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Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering
Zhao, L; Shi, LX; Wang, J; Yan, J; Chen, YL; Zheng, YQ
2020-03-15
Source PublicationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
ISSN1369-8001
SubtypeArticle
AbstractHigh-quality magnesia-doped lithium niobate (LN: MgO) films were deposited by radio-frequency magnetron sputtering. The deposited films were characterized for their structural, surface morphology and elemental atomic percentages by X-ray diffraction, Raman spectra, scanning electron microscopy and energy dispersive spectroscopy, respectively. The results show that the LN: MgO films without impurities phase has a preferred orientation of (012) plan. The optical properties of LN: MgO films were studied systematically. It reveals that the average transmittance of LN: MgO film is related to the atomic percentage of Mg element and the maximum of that is 89% when the atomic percentage of Mg element is 0.8%. The optical band gap can be adjusted from 3.85 eV to 4.04 eV by changing deposition conditions to control the grain size of the films. Moreover, the optical damage threshold of LN: MgO films was investigated and the value of that was as high as 4.68 x 10(4) W/cm(2). These characteristics of LN: MgO films may provide promising applications in the fabrication of novel opto-electronic devices.
DOI10.1016/j.mssp.2019.104901
WOS KeywordTHIN-FILMS ; LITHIUM-NIOBATE ; EPITAXIAL-GROWTH ; HEAT-TREATMENT
Language英语
WOS Research AreaEngineering ; Materials Science ; Physics
PublisherELSEVIER SCI LTD
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sic.ac.cn/handle/331005/28228
Collection中国科学院上海硅酸盐研究所
Recommended Citation
GB/T 7714
Zhao, L,Shi, LX,Wang, J,et al. Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2020.
APA Zhao, L,Shi, LX,Wang, J,Yan, J,Chen, YL,&Zheng, YQ.(2020).Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING.
MLA Zhao, L,et al."Effect of doping Mg on the structure and optical properties of LiNbO3 films prepared by radio-frequency magnetron sputtering".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2020).
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