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Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (> 20 MHz) Ultrasonic Array Transducer Applications
Lei, ZH; Chen, Y; Xu, GS; Liu, JF; Yuan, MD; Zeng, LM; Ji, XR; Wu, DW
2020-05-01
Source PublicationMICROMACHINES
Issue5
SubtypeArticle
AbstractA decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)-x%PbTiO3 (PMN-x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN-31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN-31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d(33)*similar to 1200 pm/V). Our results are promising for fabricating superior PMN-31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers.
DOI10.3390/mi11050512
WOS KeywordDESIGN ; PERFORMANCE ; CERAMICS
Language英语
WOS Research AreaScience & Technology - Other Topics ; Instruments & Instrumentation
PublisherMDPI
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sic.ac.cn/handle/331005/28087
Collection中国科学院上海硅酸盐研究所
Recommended Citation
GB/T 7714
Lei, ZH,Chen, Y,Xu, GS,et al. Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (> 20 MHz) Ultrasonic Array Transducer Applications[J]. MICROMACHINES,2020(5).
APA Lei, ZH.,Chen, Y.,Xu, GS.,Liu, JF.,Yuan, MD.,...&Wu, DW.(2020).Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (> 20 MHz) Ultrasonic Array Transducer Applications.MICROMACHINES(5).
MLA Lei, ZH,et al."Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (> 20 MHz) Ultrasonic Array Transducer Applications".MICROMACHINES .5(2020).
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