Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3

doi:10.1016/j.matchemphys.2019.05.018

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	Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3
	Liu, Wei; Jin, Lingling; Wang, Shiwei
	2019-06-15
Source Publication	MATERIALS CHEMISTRY AND PHYSICS
ISSN	0254-0584
Volume	232 Pages:471
Subtype	Article
Abstract	The plasma resistance of translucent Y2O3 ceramic prepared by slip casting was studied and compared with that of translucent Al2O3 ceramic. The color after etching is almost unchanged for transparent Y2O3, while the color turns grey after etching for translucent Al2O3. The in-line transmittance (IT) for transparent Y2O3 is almost unchanged before and after etching while IT reduces similar to 5% after etching for translucent Al2O3. The etching depth of translucent Al2O3 ceramic (similar to 270 nm) is deeper than that of transparent Y2O3 ceramic (similar to 200 nm). The surface morphology of transparent ceramics Y2O3 and Al2O3 using optical microscope and SEM both show that the etching traces of translucent Al2O3 ceramic are more obvious than that of Y2O3.
Keyword	Transparent ceramics Y2O3 Plasma resistance Optical properties
DOI	10.1016/j.matchemphys.2019.05.018
Language	英语
WOS Research Area	Materials Science
Publisher	ELSEVIER SCIENCE SA
Citation statistics
Document Type	期刊论文
Identifier	http://ir.sic.ac.cn/handle/331005/27046
Collection	中国科学院上海硅酸盐研究所
Recommended Citation GB/T 7714	Liu, Wei,Jin, Lingling,Wang, Shiwei. Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3[J]. MATERIALS CHEMISTRY AND PHYSICS,2019,232:471.
APA	Liu, Wei,Jin, Lingling,&Wang, Shiwei.(2019).Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3.MATERIALS CHEMISTRY AND PHYSICS,232,471.
MLA	Liu, Wei,et al."Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3".MATERIALS CHEMISTRY AND PHYSICS 232(2019):471.

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