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Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3
Liu, Wei; Jin, Lingling; Wang, Shiwei
2019-06-15
Source PublicationMATERIALS CHEMISTRY AND PHYSICS
ISSN0254-0584
Volume232Pages:471
SubtypeArticle
AbstractThe plasma resistance of translucent Y2O3 ceramic prepared by slip casting was studied and compared with that of translucent Al2O3 ceramic. The color after etching is almost unchanged for transparent Y2O3, while the color turns grey after etching for translucent Al2O3. The in-line transmittance (IT) for transparent Y2O3 is almost unchanged before and after etching while IT reduces similar to 5% after etching for translucent Al2O3. The etching depth of translucent Al2O3 ceramic (similar to 270 nm) is deeper than that of transparent Y2O3 ceramic (similar to 200 nm). The surface morphology of transparent ceramics Y2O3 and Al2O3 using optical microscope and SEM both show that the etching traces of translucent Al2O3 ceramic are more obvious than that of Y2O3.
KeywordTransparent ceramics Y2O3 Plasma resistance Optical properties
DOI10.1016/j.matchemphys.2019.05.018
Language英语
WOS Research AreaMaterials Science
PublisherELSEVIER SCIENCE SA
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Document Type期刊论文
Identifierhttp://ir.sic.ac.cn/handle/331005/27046
Collection中国科学院上海硅酸盐研究所
Recommended Citation
GB/T 7714
Liu, Wei,Jin, Lingling,Wang, Shiwei. Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3[J]. MATERIALS CHEMISTRY AND PHYSICS,2019,232:471.
APA Liu, Wei,Jin, Lingling,&Wang, Shiwei.(2019).Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3.MATERIALS CHEMISTRY AND PHYSICS,232,471.
MLA Liu, Wei,et al."Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3".MATERIALS CHEMISTRY AND PHYSICS 232(2019):471.
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