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Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms
Zhang, Chunyu; Guo, Bing; Zhao, Qingliang; Liu, Han; Wang, Jinhu; Zhang, Jian
2019-10-01
Source PublicationJOURNAL OF THE EUROPEAN CERAMIC SOCIETY
ISSN0955-2219
Volume39Issue:13Pages:3668
SubtypeArticle
AbstractAluminum oxynitride (AlON) can be effectively finished by ultra-precision grinding. In this work, the ultra precision grinding experiment was conducted on AlON to investigate surface characteristics and material removal mechanism. The ground surface has an unusual non-uniform morphology resulted from the different material removal modes. Grazing incidence X-ray diffraction (GIXRD), nanoindentation and Electron Back Scattered Diffraction (EBSD) were carried out to study the micro-properties of AlON. The results revealed that the micro mechanical properties vary with the grain orientation on the surface. The morphologies of ground surface are consistent in the twinned grains and change with the grain orientation. By comparing the relationship of machining size and grain size, the material removal modes of individual grains should be taken into consideration during ultra-precision grinding. Based on this, a simple theoretical model was proposed to explain the material removal mechanism of AlON under ultra-precision grinding.
KeywordAluminum oxynitride Ultra-precision grinding Non-uniform morphology Grain orientation Material removal mode
DOI10.1016/j.jeurceramsoc.2019.05.005
Language英语
WOS Research AreaMaterials Science
PublisherELSEVIER SCI LTD
Citation statistics
Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sic.ac.cn/handle/331005/26812
Collection中国科学院上海硅酸盐研究所
Recommended Citation
GB/T 7714
Zhang, Chunyu,Guo, Bing,Zhao, Qingliang,et al. Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms[J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,2019,39(13):3668.
APA Zhang, Chunyu,Guo, Bing,Zhao, Qingliang,Liu, Han,Wang, Jinhu,&Zhang, Jian.(2019).Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms.JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,39(13),3668.
MLA Zhang, Chunyu,et al."Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms".JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 39.13(2019):3668.
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