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Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering
Liu, Meng; Yang, Yong; Wei, Yuquan; Li, Yajie; Zhang, Heng; Liu, Xuejian; Huang, Zhengren
2019-11-01
Source PublicationCERAMICS INTERNATIONAL
ISSN0272-8842
Volume45Issue:16Pages:19771
SubtypeArticle
AbstractHigh-purity SiC materials have been used in semiconductor processes due to their excellent properties. However, they are difficult to densify without sintering aids. In this work, dense and high-purity SiC ceramics have been obtained by pressureless solid-state-sintering with ultra-low contents of sintering additives. The amount of residual B, C and O in the high-purity SiC ceramics was less than 0.15 wt%, respectively, and the total content of other impurity elements (such as aluminum, magnesium, calcium, iron, etc.) was less than 0.015 wt%. Finally, the purity of the as-prepared SiC ceramics was more than 99.5 wt%.
KeywordSiC Dense High-purity Pressureless solid-state-sintering
DOI10.1016/j.ceramint.2019.06.231
Language英语
WOS Research AreaMaterials Science
PublisherELSEVIER SCI LTD
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sic.ac.cn/handle/331005/26739
Collection中国科学院上海硅酸盐研究所
Recommended Citation
GB/T 7714
Liu, Meng,Yang, Yong,Wei, Yuquan,et al. Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering[J]. CERAMICS INTERNATIONAL,2019,45(16):19771.
APA Liu, Meng.,Yang, Yong.,Wei, Yuquan.,Li, Yajie.,Zhang, Heng.,...&Huang, Zhengren.(2019).Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering.CERAMICS INTERNATIONAL,45(16),19771.
MLA Liu, Meng,et al."Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering".CERAMICS INTERNATIONAL 45.16(2019):19771.
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