Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering

doi:10.1016/j.ceramint.2019.06.231

SIC OpenIR

	Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering
	Liu, Meng; Yang, Yong; Wei, Yuquan; Li, Yajie; Zhang, Heng; Liu, Xuejian; Huang, Zhengren
	2019-11-01
Source Publication	CERAMICS INTERNATIONAL
ISSN	0272-8842
Volume	45 Issue:16 Pages:19771
Subtype	Article
Abstract	High-purity SiC materials have been used in semiconductor processes due to their excellent properties. However, they are difficult to densify without sintering aids. In this work, dense and high-purity SiC ceramics have been obtained by pressureless solid-state-sintering with ultra-low contents of sintering additives. The amount of residual B, C and O in the high-purity SiC ceramics was less than 0.15 wt%, respectively, and the total content of other impurity elements (such as aluminum, magnesium, calcium, iron, etc.) was less than 0.015 wt%. Finally, the purity of the as-prepared SiC ceramics was more than 99.5 wt%.
Keyword	SiC Dense High-purity Pressureless solid-state-sintering
DOI	10.1016/j.ceramint.2019.06.231
Language	英语
WOS Research Area	Materials Science
Publisher	ELSEVIER SCI LTD
Citation statistics	Cited Times:3[WOS] [WOS Record] [Related Records in WOS]
Document Type	期刊论文
Identifier	http://ir.sic.ac.cn/handle/331005/26739
Collection	中国科学院上海硅酸盐研究所
Recommended Citation GB/T 7714	Liu, Meng,Yang, Yong,Wei, Yuquan,et al. Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering[J]. CERAMICS INTERNATIONAL,2019,45(16):19771.
APA	Liu, Meng.,Yang, Yong.,Wei, Yuquan.,Li, Yajie.,Zhang, Heng.,...&Huang, Zhengren.(2019).Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering.CERAMICS INTERNATIONAL,45(16),19771.
MLA	Liu, Meng,et al."Preparation of dense and high-purity SiC ceramics by pressureless solid-state-sintering".CERAMICS INTERNATIONAL 45.16(2019):19771.

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