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Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling
Zou Hui-Jun; Wang Zheng; Li Qing; Huang Chu-Chu
2017
Source PublicationCHINESE JOURNAL OF ANALYTICAL CHEMISTRY
ISSN0253-3820
Volume45Issue:7Pages:973
AbstractTrace impurities of Al, Ca, Co, Fe, K, Mg, Mn, Na, Ni in silicon nitride powder were determined by slurry introduction into a solution. cathode glow discharge. atomic emission spectrometer (SCGD-AES). The effect of particle size on the stability of suspension was investigated. A 6-port valve was selected to link sampling system and SCGD-AES, by which the suspension could be introduced into the SCGD-AES to get instantaneous spectrum signal. The calibration curves for quantitative analysis could be established using aqueous standards and the pH of suspension was not required to be adjusted accurately. The applied voltage, solution flow rate, and integral time of PMT were set to 1080 V, 1.2 mL/min and 800 ms, respectively. In this work, slurry sampling was combined with SCGD-AES by a 6 port 2-pos valve. Powder Si3N4 was tested by this way and the limits of detection for all nine elements were 0.2-53.0 mg/kg. The RSDs were 1.1% - 5.0%. The detection result of trace impurities in standard reference material ERM-ED101 agreed with that obtained from inductively coupled plasma atomic emission spectrometry. This method was proved to be accurate, reliable and valuable.
DOI10.11895/j.issn.0253.3820.170150
WOS IDWOS:000427850800004
EI Accession Number1872-2040
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sic.ac.cn/handle/331005/26665
Collection中国科学院上海硅酸盐研究所
Affiliation1.[Zou Hui-Jun
2.Wang Zheng
3.Li Qing
4.Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China
Recommended Citation
GB/T 7714
Zou Hui-Jun,Wang Zheng,Li Qing,et al. Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling[J]. CHINESE JOURNAL OF ANALYTICAL CHEMISTRY,2017,45(7):973.
APA Zou Hui-Jun,Wang Zheng,Li Qing,&Huang Chu-Chu.(2017).Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling.CHINESE JOURNAL OF ANALYTICAL CHEMISTRY,45(7),973.
MLA Zou Hui-Jun,et al."Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling".CHINESE JOURNAL OF ANALYTICAL CHEMISTRY 45.7(2017):973.
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