Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling

doi:10.11895/j.issn.0253.3820.170150

SIC OpenIR

	Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling
	Zou Hui-Jun ; Wang Zheng ; Li Qing ; Huang Chu-Chu
	2017
发表期刊	CHINESE JOURNAL OF ANALYTICAL CHEMISTRY
ISSN	0253-3820
卷号	45 期号:7 页码:973
摘要	Trace impurities of Al, Ca, Co, Fe, K, Mg, Mn, Na, Ni in silicon nitride powder were determined by slurry introduction into a solution. cathode glow discharge. atomic emission spectrometer (SCGD-AES). The effect of particle size on the stability of suspension was investigated. A 6-port valve was selected to link sampling system and SCGD-AES, by which the suspension could be introduced into the SCGD-AES to get instantaneous spectrum signal. The calibration curves for quantitative analysis could be established using aqueous standards and the pH of suspension was not required to be adjusted accurately. The applied voltage, solution flow rate, and integral time of PMT were set to 1080 V, 1.2 mL/min and 800 ms, respectively. In this work, slurry sampling was combined with SCGD-AES by a 6 port 2-pos valve. Powder Si3N4 was tested by this way and the limits of detection for all nine elements were 0.2-53.0 mg/kg. The RSDs were 1.1% - 5.0%. The detection result of trace impurities in standard reference material ERM-ED101 agreed with that obtained from inductively coupled plasma atomic emission spectrometry. This method was proved to be accurate, reliable and valuable.
DOI	10.11895/j.issn.0253.3820.170150
WOS记录号	WOS:000427850800004
EI入藏号	1872-2040
引用统计
文献类型	期刊论文
条目标识符	http://ir.sic.ac.cn/handle/331005/26665
专题	中国科学院上海硅酸盐研究所
作者单位	1.[Zou Hui-Jun 2.Wang Zheng 3.Li Qing 4.Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China
推荐引用方式 GB/T 7714	Zou Hui-Jun,Wang Zheng,Li Qing,et al. Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling[J]. CHINESE JOURNAL OF ANALYTICAL CHEMISTRY,2017,45(7):973.
APA	Zou Hui-Jun,Wang Zheng,Li Qing,&Huang Chu-Chu.(2017).Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling.CHINESE JOURNAL OF ANALYTICAL CHEMISTRY,45(7),973.
MLA	Zou Hui-Jun,et al."Determination of Trace Metals in High-purity Silicon Nitride Powder by Solution. cathode Glow Discharge-atomic Emission Spectrometer Using Slurry Sampling".CHINESE JOURNAL OF ANALYTICAL CHEMISTRY 45.7(2017):973.