SIC OpenIR
High temperature piezoelectric bulk acoustic wave mass sensor for thermogravimetric analysis of nano-layer polymer
Zu, Hongfei1; Wang, Qing-Ming1; Zheng, Yanqing2
2017
发表期刊2017 IEEE 17th International Conference on Nanotechnology, NANO 2017
页码663-667
摘要The acoustic wave (AW) sensors can response to a physical, chemical, or biological stimulus in a sensitive and real-time manner, so they have drawn increasing attraction in recent years. Among the AW sensors, the piezoelectric ones show a lot of extraordinary merits such as high resolution, wide frequency and temperature ranges, high stability, low power consumption, and low cost, and they are able to sense many physical and chemical quantities such as temperature, pressure, mass, gas concentration, and liquid viscosity [1-3]. To date, many surface acoustic wave (SAW) sensors [4], thin film bulk acoustic resonators (FBAR) [5], and bulk acoustic wave (BAW) [6] sensors have been reported as mass sensors. Compared to the former two types, BAW mass sensors are with the property of simple preparation process, easy to use, high temperature-tolerance, high repeatability and durability, and little damping, because neither the interdigitated transducers (IDTs) nor the functional piezoelectric thin film is needed. Therefore, piezoelectric BAW mass sensors that can be used at elevated temperature range are ideal devices for thermogravimetric analysis (TGA) applications. © 2017 IEEE.
DOI10.1109/NANO.2017.8117353
EI入藏号20180604700470
EI主题词Thermogravimetric analysis
EI分类号701.1 Electricity: Basic Concepts and Phenomena - 751.1 Acoustic Waves - 752.1 Acoustic Devices - 761 Nanotechnology - 801 Chemistry
引用统计
文献类型期刊论文
条目标识符http://ir.sic.ac.cn/handle/331005/25846
专题中国科学院上海硅酸盐研究所
作者单位1.Dept. Mechanical Engineering and Materials Science, University of Pittsburgh, Pittsburgh, United States;
2.Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, China
推荐引用方式
GB/T 7714
Zu, Hongfei,Wang, Qing-Ming,Zheng, Yanqing. High temperature piezoelectric bulk acoustic wave mass sensor for thermogravimetric analysis of nano-layer polymer[J]. 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017,2017:663-667.
APA Zu, Hongfei,Wang, Qing-Ming,&Zheng, Yanqing.(2017).High temperature piezoelectric bulk acoustic wave mass sensor for thermogravimetric analysis of nano-layer polymer.2017 IEEE 17th International Conference on Nanotechnology, NANO 2017,663-667.
MLA Zu, Hongfei,et al."High temperature piezoelectric bulk acoustic wave mass sensor for thermogravimetric analysis of nano-layer polymer".2017 IEEE 17th International Conference on Nanotechnology, NANO 2017 (2017):663-667.
条目包含的文件
条目无相关文件。
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Zu, Hongfei]的文章
[Wang, Qing-Ming]的文章
[Zheng, Yanqing]的文章
百度学术
百度学术中相似的文章
[Zu, Hongfei]的文章
[Wang, Qing-Ming]的文章
[Zheng, Yanqing]的文章
必应学术
必应学术中相似的文章
[Zu, Hongfei]的文章
[Wang, Qing-Ming]的文章
[Zheng, Yanqing]的文章
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。