SIC OpenIR
High temperature piezoelectric bulk acoustic wave mass sensor for thermogravimetric analysis of nano-layer polymer
Zu, Hongfei1; Wang, Qing-Ming1; Zheng, Yanqing2
2017
Source Publication2017 IEEE 17th International Conference on Nanotechnology, NANO 2017
Pages663-667
AbstractThe acoustic wave (AW) sensors can response to a physical, chemical, or biological stimulus in a sensitive and real-time manner, so they have drawn increasing attraction in recent years. Among the AW sensors, the piezoelectric ones show a lot of extraordinary merits such as high resolution, wide frequency and temperature ranges, high stability, low power consumption, and low cost, and they are able to sense many physical and chemical quantities such as temperature, pressure, mass, gas concentration, and liquid viscosity [1-3]. To date, many surface acoustic wave (SAW) sensors [4], thin film bulk acoustic resonators (FBAR) [5], and bulk acoustic wave (BAW) [6] sensors have been reported as mass sensors. Compared to the former two types, BAW mass sensors are with the property of simple preparation process, easy to use, high temperature-tolerance, high repeatability and durability, and little damping, because neither the interdigitated transducers (IDTs) nor the functional piezoelectric thin film is needed. Therefore, piezoelectric BAW mass sensors that can be used at elevated temperature range are ideal devices for thermogravimetric analysis (TGA) applications. © 2017 IEEE.
DOI10.1109/NANO.2017.8117353
EI Accession Number20180604700470
EI KeywordsThermogravimetric analysis
EI Classification Number701.1 Electricity: Basic Concepts and Phenomena - 751.1 Acoustic Waves - 752.1 Acoustic Devices - 761 Nanotechnology - 801 Chemistry
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sic.ac.cn/handle/331005/25846
Collection中国科学院上海硅酸盐研究所
Affiliation1.Dept. Mechanical Engineering and Materials Science, University of Pittsburgh, Pittsburgh, United States;
2.Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, China
Recommended Citation
GB/T 7714
Zu, Hongfei,Wang, Qing-Ming,Zheng, Yanqing. High temperature piezoelectric bulk acoustic wave mass sensor for thermogravimetric analysis of nano-layer polymer[J]. 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017,2017:663-667.
APA Zu, Hongfei,Wang, Qing-Ming,&Zheng, Yanqing.(2017).High temperature piezoelectric bulk acoustic wave mass sensor for thermogravimetric analysis of nano-layer polymer.2017 IEEE 17th International Conference on Nanotechnology, NANO 2017,663-667.
MLA Zu, Hongfei,et al."High temperature piezoelectric bulk acoustic wave mass sensor for thermogravimetric analysis of nano-layer polymer".2017 IEEE 17th International Conference on Nanotechnology, NANO 2017 (2017):663-667.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zu, Hongfei]'s Articles
[Wang, Qing-Ming]'s Articles
[Zheng, Yanqing]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zu, Hongfei]'s Articles
[Wang, Qing-Ming]'s Articles
[Zheng, Yanqing]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zu, Hongfei]'s Articles
[Wang, Qing-Ming]'s Articles
[Zheng, Yanqing]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.