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Annealing effects on the microstructure and magnetic properties of Y3Fe5O12films deposited on Si/SiO2substrates by RF magnetron sputtering
Lian, Jianyun1,2; Chen, Ying1; Liu, Zhen1; Zhu, Mingkang1; Wang, Genshui1; Zhang, Wenbin1; Dong, Xianlin1
2017
Source PublicationCeramics International
ISSN02728842
Volume43Issue:10Pages:7477-7481
AbstractCrack-free Yttrium iron garnet (Y3Fe5O12, YIG) thin films were successfully deposited on Si/SiO2substrates by RF magnetron sputtering, through controlling the annealing temperature and cooling rate during post-annealing process. The annealing condition dependences of crystallinity, microstructures and magnetic properties of YIG films were investigated. With the increase of the annealing temperature, the saturation magnetization of YIG films increases and the coercive field decreases, while the ferromagnetic resonance (FMR) linewidth becomes wider. The films annealed at 750 °C with cooling rate of 1 °C/min are crack-free and present excellent comprehensive performances, the corresponding coercive field is 32 Oe and the FMR linewidth is 57 Oe at 9.4 GHz. These results indicate that high-quality crack-free YIG films with excellent magnetic properties can be achieved on Si/SiO2substrates by controlling the annealing process, which makes it more convenient to fabricate low-loss microwave integrated devices. © 2017 Elsevier Ltd and Techna Group S.r.l.
DOI10.1016/j.ceramint.2017.03.023
EI Accession Number20171103447583
EI KeywordsAnnealing
EI Classification Number537.1 Heat Treatment Processes - 641.2 Heat Transfer - 701.2 Magnetism: Basic Concepts and Phenomena - 708.4 Magnetic Materials - 931.3 Atomic and Molecular Physics - 951 Materials Science
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Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sic.ac.cn/handle/331005/25809
Collection中国科学院上海硅酸盐研究所
Affiliation1.Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai; 200050, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
Recommended Citation
GB/T 7714
Lian, Jianyun,Chen, Ying,Liu, Zhen,et al. Annealing effects on the microstructure and magnetic properties of Y3Fe5O12films deposited on Si/SiO2substrates by RF magnetron sputtering[J]. Ceramics International,2017,43(10):7477-7481.
APA Lian, Jianyun.,Chen, Ying.,Liu, Zhen.,Zhu, Mingkang.,Wang, Genshui.,...&Dong, Xianlin.(2017).Annealing effects on the microstructure and magnetic properties of Y3Fe5O12films deposited on Si/SiO2substrates by RF magnetron sputtering.Ceramics International,43(10),7477-7481.
MLA Lian, Jianyun,et al."Annealing effects on the microstructure and magnetic properties of Y3Fe5O12films deposited on Si/SiO2substrates by RF magnetron sputtering".Ceramics International 43.10(2017):7477-7481.
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